High-temperature deposition sources

Electron-Beam Evaporation Source Materials

Metals and compounds prepared in practical source forms for electron-beam evaporation.

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Category overview

A defined product group.
An open specification range.

E-beam source selection considers melting or sublimation behavior, crucible compatibility, spitting risk, source form and the required film purity.

Representative materials

Frequently requested products.

Availability, final purity, dimensions and documentation are confirmed with each quotation.

01Ti

Titanium

Pellets or slugs

High-purity source

02Ta

Tantalum

Pellets or pieces

Refractory metal

03Hf

Hafnium

Pieces

High-temperature source

04HfO₂

Hafnium Dioxide

Pellets or pieces

High-k films

05Al₂O₃

Aluminium Oxide

Pellets

Dielectric films

06Ta₂O₅

Tantalum Pentoxide

Granules or pieces

Optical films

Supply forms

Available configurations

Pellets
Slugs
Pieces
Granules
Custom crucible-matched sizes

Applications

Typical use areas

High-purity metallization
Refractory metal films
Dielectric layers
Optical coatings
Semiconductor R&D
Protective coatings

For a precise RFQ

Information to include

Material and purity
Preferred source form
Crucible or hearth dimensions
Total quantity
Process conditions
Application

Technical inquiry

Send your electron-beam evaporation source materials requirement.

Send the material, purity, dimensions, quantity and application. We will review the complete specification before quoting.

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